PWB-820222-2 ASML PCB Analog I/O Board

description

The ASML PWB-820222-2 is identified as an Analog Input/Output (I/O) Board specifically designed for use within ASML's SVG 90S lithography track systems. These systems were crucial in the semiconductor manufacturing process for preparing silicon wafers for exposure by applying and processing photoresist.Acquiring Analog Data: Receiving signals from sensors monitoring parameters like temperature of heating plates, pressure in coating and development chambers, flow rates of chemicals, and positions of mechanical components. The board would then convert these analog signals into digital data for the system's central processing unit to interpret and react to.

FEATURE

Multiple Analog Input Channels: Designed to receive signals from several analog sensors monitoring various process parameters.

Multiple Analog Output Channels: Capable of generating analog control signals to drive actuators and control devices within the system.

Analog-to-Digital Conversion (ADC): Onboard circuitry to convert incoming analog signals into digital data for processing by the system's control unit.

Digital-to-Analog Conversion (DAC): Functionality to convert digital control commands into analog signals for output to external devices.

Application

Temperature Control: Receiving signals from temperature sensors on heating plates and sending control signals to heating elements to maintain precise temperatures required for baking the photoresist.

Pressure Regulation: Monitoring pressure levels within coating and development chambers using pressure transducers and controlling valves or pumps to maintain optimal pressure for these processes.

Fluid Flow Control: Interfacing with flow sensors to monitor the dispensing of photoresist and developer solutions and controlling pumps or valves to regulate the flow rates accurately.