MKS 626A01TDE Specification
| Manufacturers | MKS |
| Type | Pressure Transducer |
| Sensor Type | Capacitance Manometer |
| Operating Temperature Range | 0-50 ℃ |
| Analog output | 0-10 VDC |
| Accuracy | 0.25% of Reading |
| Electrical Connector | 15-pin D-sub |
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MKS 626A01TDE Features
1. Gas-Independent Measurement: Unlike thermal or ionization gauges, the MKS 626A01TDE measures the physical displacement of a diaphragm. MKS Absolute Pressure Transducers allows it to provide precise total pressure readings regardless of the gas composition in your vacuum system.
2. Corrosion-Resistant Construction: The MKS 626A01TDE features an all-welded design with wetted surfaces made of Inconel. MKS Absolute Pressure Transducers material choice ensures the sensor can withstand exposure to aggressive or corrosive process gases without degradation.
3. High-Resolution Accuracy: The MKS 626A01TDE offers a high accuracy of 0.25% of reading. TMKS Absolute Pressure Transducers, combined with its 1 Torr full-scale range, makes it ideal for critical vacuum processes requiring tight pressure control.
4. Excellent Overpressure Protection: Designed for industrial durability, the MKS 626A01TDE can withstand repeated exposures to pressures up to 45 psia without requiring recalibration or suffering permanent damage.
5. Fast Real-Time Response: The MKS 626A01TDE provides a linear 0-10 VDC analog output with a response time of less than 20 milliseconds, making it perfect for high-speed automated control loops and data acquisition.
MKS 626A01TDE FAQ
Q1: How does the MKS 626A01TDE maintain measurement accuracy regardless of gas type?
The MKS 626A01TDE is an absolute capacitance manometer that measures pressure by detecting the physical capacitance change caused by the deflection of its internal diaphragm. Because MKS Absolute Pressure Transducers relies on mechanical force rather than thermal conductivity or ionization properties, the MKS 626A01TDE provides a true total pressure measurement that is completely independent of the gas species or mixture.Q2: What is the recommended orientation for installing the MKS 626A01TDE to ensure optimal performance?
While the MKS 626A01TDE can be mounted in any position, MKS Absolute Pressure Transducers is highly recommended to install the unit with the vacuum flange facing downward. This orientation prevents particulates or condensable contaminants from settling on the sensitive Inconel diaphragm, which helps maintain the long-term calibration stability and response speed of the MKS 626A01TDE.
While the MKS 626A01TDE can be mounted in any position, MKS Absolute Pressure Transducers is highly recommended to install the unit with the vacuum flange facing downward. This orientation prevents particulates or condensable contaminants from settling on the sensitive Inconel diaphragm, which helps maintain the long-term calibration stability and response speed of the MKS 626A01TDE.
Q3: How should the zero adjustment be performed on the MKS 626A01TDE?
To calibrate the zero point, MKS Absolute Pressure Transducers must be evacuated to a pressure at least one order of magnitude below the resolution of the gauge. Once the system is stable, the zero potentiometer on the MKS 626A01TDE should be adjusted until the output reads exactly 0.000 VDC. This accounts for any mounting strain or ambient temperature shifts affecting the MKS 626A01TDE.
To calibrate the zero point, MKS Absolute Pressure Transducers must be evacuated to a pressure at least one order of magnitude below the resolution of the gauge. Once the system is stable, the zero potentiometer on the MKS 626A01TDE should be adjusted until the output reads exactly 0.000 VDC. This accounts for any mounting strain or ambient temperature shifts affecting the MKS 626A01TDE.
Q4: Can the MKS 626A01TDE handle exposure to atmospheric pressure or higher?
Yes, the MKS 626A01TDE is designed with robust overpressure protection. It can withstand repeated exposures to pressures up to 45 psia without damaging the internal sensing element. This ensures that the MKS 626A01TDE remains functional and accurate even after sudden system venting or accidental over-pressurization.
Yes, the MKS 626A01TDE is designed with robust overpressure protection. It can withstand repeated exposures to pressures up to 45 psia without damaging the internal sensing element. This ensures that the MKS 626A01TDE remains functional and accurate even after sudden system venting or accidental over-pressurization.
Q5: Why is Inconel used for the wetted parts of the MKS 626A01TDE?
626A01TDE Absolute Pressure Transducers utilizes Inconel for all surfaces that come into contact with the process gas because of its exceptional resistance to corrosion. This allows the MKS 626A01TDE to be used in demanding semiconductor and chemical vapor deposition processes involving aggressive gases that would degrade standard stainless steel sensors.
626A01TDE Absolute Pressure Transducers utilizes Inconel for all surfaces that come into contact with the process gas because of its exceptional resistance to corrosion. This allows the MKS 626A01TDE to be used in demanding semiconductor and chemical vapor deposition processes involving aggressive gases that would degrade standard stainless steel sensors.
Q6: What are the power requirements and signal output characteristics of the MKS 626A01TDE?
The 626A01TDE Absolute Pressure Transducers requires a dual-polarity power supply of +/-15 VDC. 626A01TDE Absolute Pressure Transducers provides a highly linear 0 to 10 VDC analog output signal, where 10V corresponds precisely to the 1 Torr full-scale range. 626A01TDE Absolute Pressure Transducers standardized output allows the MKS 626A01TDE to be easily integrated into PLC systems, vacuum controllers, or data acquisition modules.
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